By using micro solid state technology (MEMS), Bronkhorst has produced a new breed of ultra compact flow and pressure controllers with a footprint dimension of 20mm, half that previously achieved.


Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have used an industry standard width, using a footprint of 1.5'', as for instance specified in the NeSSI system. This width was needed for the technology in use previously.

Now, and in close co-operation with TNO-TPD (the leading Dutch institute for applied physics) Bronkhorst High-Tech has developed the IQ+Flow mass flow sensor.

By using micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension, the width of the unit, to 0.75'', (20mm) with a depth of 40mm, thereby realising a new breed of ultra compact flow and pressure controllers.

A core philosophy of Bronkhorst High-Tech has always been to form close working links and collaborations with Original Equipment Manufacturers, to ensure optimised integration of the Bronkhorst instruments within their own equipment.

Most often this results in a bespoke design in which various required functions are combined into one micro fluidic system.

The IQ+Flow concept offers any selection from the following functional modules within the IQ+Flow 0.75'' footprint.

* Gas flowmeter; typical flow ranges from 1 sccm to 2000 sccm (Full Scale values).

* Pressure meter; typical pressure ranges of the order of 100 psi.

* Control valve.

* Three-way valve.

* Shut-off valve.

* Filter.

* Mixing chamber.

A combination of these modules in a multi-gas system can be mounted on a compact manifold, in line with the customer requirement, and following open design discussions.

Further possibilities might include either an aluminium or a stainless steel manifold with perhaps female inlet/outlet ports that could be suitable for either gas or liquid.

As there are truly an infinite number of possible solutions, it is recommended that you discuss your requirement with Bronkhorst High-Tech to see what the IQ+Flow can offer.

Some of the main features of IQ+Flow are.

* Very stable Zero, due to the thermally balanced chip-sensor.

* Compact assembly, ensuring space efficiency.

* Economical solution, with low cost of ownership.

* Tubeless construction, to reduce potential leak points.

* Top-mount modules; easily accessible.

* Pre-tested 'Plug and Play' units, reducing custom testing requirements.

* Analogue and digital (RS232) communication.

Some examples of the initial analytical applications of the ultra compact IQ+Flow modules.

* Flow - Pressure control at the injector side of a GC.

* Flow control at the detector side of a GC or HPLC.

* Flow control in an FID detector.